DocumentCode
1753943
Title
Improve fab performance by using a unique system that support overall equipment efficiency methodology
Author
Bakshi, Maya ; Segal, Tomer ; Bouhnik, Sylvain
Author_Institution
Micron, Qiryat Gat, Israel
fYear
2010
fDate
18-20 Oct. 2010
Firstpage
1
Lastpage
4
Abstract
In advanced semiconductor manufacturing, capital equipment drives the largest cost in producing products. The best way to increase productivity capabilities while using the same existing capacity (number of tools) is by maximizing the tools´ utilization or availability and minimizing the running loss. Indeed, sometimes the tools are not fully utilized. So why invest in more expensive capital equipment when you may be able to get the extra capacity benefits that you need by improving equipment performance?
Keywords
integrated circuit manufacture; production equipment; production management; productivity; semiconductor industry; advanced semiconductor manufacturing; capital equipment; equipment performance; fab performance; overall equipment efficiency methodology; productivity; Argon; Decision support systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM), 2010 International Symposium on
Conference_Location
Tokyo
ISSN
1523-553X
Print_ISBN
978-1-4577-0392-8
Electronic_ISBN
1523-553X
Type
conf
Filename
5750212
Link To Document