• DocumentCode
    1753943
  • Title

    Improve fab performance by using a unique system that support overall equipment efficiency methodology

  • Author

    Bakshi, Maya ; Segal, Tomer ; Bouhnik, Sylvain

  • Author_Institution
    Micron, Qiryat Gat, Israel
  • fYear
    2010
  • fDate
    18-20 Oct. 2010
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In advanced semiconductor manufacturing, capital equipment drives the largest cost in producing products. The best way to increase productivity capabilities while using the same existing capacity (number of tools) is by maximizing the tools´ utilization or availability and minimizing the running loss. Indeed, sometimes the tools are not fully utilized. So why invest in more expensive capital equipment when you may be able to get the extra capacity benefits that you need by improving equipment performance?
  • Keywords
    integrated circuit manufacture; production equipment; production management; productivity; semiconductor industry; advanced semiconductor manufacturing; capital equipment; equipment performance; fab performance; overall equipment efficiency methodology; productivity; Argon; Decision support systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing (ISSM), 2010 International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    978-1-4577-0392-8
  • Electronic_ISBN
    1523-553X
  • Type

    conf

  • Filename
    5750212