DocumentCode
1753946
Title
The method of modeling of cycle time and consumable cost of batch Tool
Author
Tsukahara, Hiroyuki ; Imai, Tadashi ; Namiokai, Yoshiaki ; Hosoe, Hisashi
Author_Institution
Panasonic Semicond. Eng. Co., Ltd., Uozu, Japan
fYear
2010
fDate
18-20 Oct. 2010
Firstpage
1
Lastpage
4
Abstract
This paper discusses a modeling method of tool cycle time and tool consumable cost in a batch tool. The relation between the tool cycle time, the tool consumable cost, and the batch waiting time of the batch tool is modeled by applying the queueing theory. This method optimizes the batch waiting time in consideration of the tool cycle time and the tool consumable cost of the batch tool.
Keywords
batch processing (industrial); costing; machine tools; optimisation; queueing theory; semiconductor industry; batch tool; batch waiting time optimization; queueing theory; tool consumable cost; tool cycle time;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM), 2010 International Symposium on
Conference_Location
Tokyo
ISSN
1523-553X
Print_ISBN
978-1-4577-0392-8
Electronic_ISBN
1523-553X
Type
conf
Filename
5750215
Link To Document