Design and Control of a High Acceleration and High Precision Air Bearing Stage

In order to meet the requirements of next generation chip manufacturing equipments, a high acceleration and high precision air bearing stage is designed and manufactured in this paper. In the stage, friction is very low, which eliminates the effects of nonlinear friction on the stage´s positioning and acceleration performance. At the same time, a controller consisting of current loop, velocity loop and position loop is designed to improve the damping characteristics of the system to avoid the system to be extreme oscillating. By using suitable controlling parameters in the velocity loop, the acceleration of the stage excesses 7G and the positioning accuracy is within ±1.5μm. Moreover, the experiments show that the stage has excellent repeatable accuracy.