DocumentCode
1754196
Title
High density 3D integration by pre-applied Inter Chip Fill
Author
Horibe, Akihiro ; Sueoka, Kuniaki ; Sakuma, Katsuyuki ; Kohara, Sayuri ; Matsumoto, Keiji ; Kikuchi, Hidekazu ; Orii, Yasumitsu ; Mitsuhashi, Toshiro ; Yamada, Fumiaki
Author_Institution
Assoc. of Super-Adv. Electron. Technol. (ASET), Yamato, Japan
fYear
2010
fDate
16-18 Nov. 2010
Firstpage
1
Lastpage
5
Abstract
28,561 bumps/die were electrically connected by Stack Joining method using pre-applied Inter Chip Fill resin.
Keywords
three-dimensional integrated circuits; bumps/die; high density 3D integration; pre-applied inter chip fill resin; stack joining method; Resins; Silicon; Strain; Stress; Three dimensional displays; Through-silicon vias;
fLanguage
English
Publisher
ieee
Conference_Titel
3D Systems Integration Conference (3DIC), 2010 IEEE International
Conference_Location
Munich
Print_ISBN
978-1-4577-0526-7
Type
conf
DOI
10.1109/3DIC.2010.5751461
Filename
5751461
Link To Document