High-Speed Magnetic Microrobot Actuation in a Microfluidic Chip by a Fine V-Groove Surface

Microrobots are promising tools for the treatment of biological cells because of their lack of skill dependence, high throughput, and high repeatability. Integration of a microfluidic chip and robotics based on microelectromechanical systems technology is a key challenge for biomedical innovations. In addition to the advantage of environmental control by a microfluidic chip, robots enable physical operations on the cell with high throughput. This paper presents high-speed microrobotic actuation driven by permanent magnets in a microfluidic chip. The developed microrobot has a milli-Newton-level output force from a permanent magnet, micrometer-level positioning accuracy, and drive speed of over 280 mm/s. The riblet surface, which is a regularly arrayed V-groove, reduces fluid friction and enables high-speed actuation. Ni and Si composite fabrication was employed to form the optimum riblet shape on the microrobot´s surface by wet and dry etching. The evaluation experiments show that the microrobot can be actuated at a rate of up to 90 Hz, which is more than ten times higher than that of the microrobot without a riblet. Two distinguish applications of the developed microrobots were demonstrated in a microfluidic chip.