DocumentCode :
1756824
Title :
A Surface Acoustic Wave Passive and Wireless Sensor for Magnetic Fields, Temperature, and Humidity
Author :
Bodong Li ; Yassine, Omar ; Kosel, Jurgen
Author_Institution :
Comput. Electr. & Math. Sci. & Eng. Div., King Abdullah Univ. of Sci. & Technol., Thuwal, Saudi Arabia
Volume :
15
Issue :
1
fYear :
2015
fDate :
Jan. 2015
Firstpage :
453
Lastpage :
462
Abstract :
In this paper, we report an integrated single-chip surface acoustic wave sensor with the capability of measuring magnetic field, temperature, and humidity. The sensor is fabricated using a thermally sensitive LiNbO3 substrate, a humidity sensitive hydrogel coating, and a magnetic field sensitive impedance load. The sensor response to individually and simultaneously changing magnetic field, temperature and humidity is characterized by connecting a network analyzer directly to the sensor. Analytical models for each measurand are derived and used to compensate noise due to cross sensitivities. The results show that all three measurands can be monitored in parallel with sensitivities of 75 ppm/°C, 0.13 dB/%R.H. (at 50%R.H.), 0.18 dB/Oe and resolutions of 0.1 °C, 0.4%R.H., 1 Oe for temperature, humidity and magnetic field, respectively. A passive wireless measurement is also conducted on a current line using, which shows the sensors capability to measure both temperature and current signals simultaneously.
Keywords :
humidity measurement; hydrogels; magnetic field measurement; network analysers; surface acoustic wave sensors; temperature measurement; wireless sensor networks; cross sensitivity; current line; humidity measurement; humidity sensitive hydrogel coating; integrated single chip surface acoustic wave sensor; magnetic field measurement; magnetic field sensitive impedance load; network analyzer; noise compensation; passive wireless measurement; surface acoustic wave passive sensor; temperature measurement; wireless sensor; Humidity; Magnetic fields; Magnetic sensors; Surface acoustic waves; Temperature measurement; Temperature sensors; A SAW sensor; humidity sensor; magnetic sensor; multifunctional sensor; surface acoustic wave; temperature sensor; wireless and passive sensor;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2014.2335058
Filename :
6853344
Link To Document :
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