A MIMO Double Resonant Controller Design for Nanopositioners

Author

Das, Sajal K. ; Pota, Hemanshu R. ; Petersen, Ian R.

Author_Institution

Sch. of Eng. & Inf. Technol., Univ. of New South Wales at Australian Defence Force Acad., Canberra, ACT, Australia

Volume

14

Issue

2

fYear

2015

fDate

42064

Firstpage

224

Lastpage

237

Abstract

A design of a double resonant controller to enhance the high-speed nanopositioning performance of a piezoelectric tube scanner (PTS) is presented in this paper. The design of the controller is demonstrated using a multi-input multi-output framework for damping, tracking, and cross coupling control in the PTS. A reference model control technique is applied to design the controller. The controller proposed in this paper achieves a bandwidth near to the first resonance frequency of the PTS. The controller is robust against changes in the resonance frequency of the PTS due to load change on the scanner. Experimental results using open-loop, closed-loop, and the built-in AFM proportional integral controller are presented to show the effectiveness of the proposed controller.

Keywords

MIMO systems; PI control; atomic force microscopy; closed loop systems; control system synthesis; damping; nanopositioning; open loop systems; piezoelectric actuators; resonance; robust control; tracking; MIMO double resonant controller design; PTS; built-in AFM proportional integral controller; closed-loop controller; cross coupling control; damping; high-speed nanopositioning performance; multiinput multioutput framework; nanopositioner; open-loop controller; piezoelectric tube scanner; reference model control technique; resonance frequency; robust controller; tracking; Bandwidth; Couplings; Damping; Frequency measurement; MIMO; Nanopositioning; Resonant frequency; Atomic force microscope; piezoelectric tube scanner; resonant controller;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2014.2381274

Filename

6985642