Title :
Effect of ZnO Buffer Layer on the Bending Durability of ZnO:Ga Films Grown on Flexible Substrates: Investigation of Surface Energy, Electrical, Optical, and Structural Properties
Author :
Jia-Ling Wu ; Yu-Cheng Chen ; Han-Yu Lin ; Sheng-Yuan Chu ; Chia-Chiang Chang ; Chin-Jyi Wu ; Yung-Der Juang
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
ZnO:Ga (GZO) transparent conducting oxide (TCO) films are deposited on flexible polyethersulfone (PES) substrates using the radio frequency sputtering technique. The bending durability of flexible TCOs is improved by inserting 100-nm-thick ZnO buffer layers. The strain of the samples with and without buffer layers arising from bending is studied using X-ray diffraction. After the insertion of 100-nm-thick ZnO buffer layers, the strain of GZO films without ZnO after outward and inward bending for 2000 cycles decreases from 2.063 ×10-3 and 2.203 × 10-3 to 1.74 × 10-3 and 1.966 × 10-3, respectively. Such strain variation is caused by the difference in adhesive force at the surface of 100-nm-thick ZnO/PES and PES. The surface energy of PES and 100-nm-thick ZnO/PES bent outwards and inwards for 2000 cycles increased from 34.38 and 30.56 to 36.45 and 36.03 mJ/m2, respectively.
Keywords :
gallium; polymers; semiconductor thin films; sputtering; surface energy; zinc compounds; PES substrate; TCO film; X-ray diffraction; ZnO buffer layer; ZnO:Ga; adhesive force; bending durability; electrical property; flexible polyethersulfone; flexible substrate; optical property; radio frequency sputtering technique; strain variation; structural property; surface energy; transparent conducting oxide; Bending durability; ZnO buffer layer; ZnO:Ga (GZO); strain; surface energy; transparent conductive oxide (TCO);
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2013.2259491