Micropump for Generation and Control of Vacuum Inside Miniature Devices

Author

Grzebyk, Tomasz P. ; Gorecka-Drzazga, Anna ; Dziuban, Jan A. ; Zawada, A. ; Konarski, P.

Author_Institution

Wroclaw Univ. of Technol., Wrocław, Poland

Volume

23

Issue

1

fYear

2014

fDate

Feb. 2014

Firstpage

50

Lastpage

55

Abstract

The microengineered MEMS-type ion-sorption micropump with field-emission electron source has been shown. Effective emission properties of the carbon nanotubes cathode ensure satisfactory efficiency of residual gas ionization, showing possibility of active pumping of circa 0.05 cm³ volume down to 10^-5 hPa. Measurement of ion current allows estimation of vacuum level inside the microcavity.

Keywords

carbon nanotubes; cathodes; electron field emission; electron sources; ionisation; microcavities; micropumps; vacuum control; C; active pumping; carbon nanotubes cathode; effective emission properties; field-emission electron source; ion current measurement; ion-sorption micropump; microcavity; microengineered MEMS; miniature devices; residual gas ionization; vacuum control; vacuum generation; Anodes; Cathodes; Gettering; Glass; Micromechanical devices; Micropumps; Silicon; Field-emission electron source; MEMS; gas ionization; miniature pump;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2013.2288926

Filename

6664998