Title :
ZnO Nanorod-Based Humidity Sensors With Fast Response
Author :
Soyoun Jung ; Taeksoo Ji
Author_Institution :
Samsung Display Co., Ltd., Youngin, South Korea
Abstract :
Humidity sensors based on ZnO nanorods (NRs) have been developed using a Wheatstone bride (WB) configuration, where the ZnO NRs were selectively grown onto the one quadrant of the WB circuit. It turns out that the WB-based sensor possesses superior performances in terms of response and recovery time, and thermal stability in comparison with conventional types of resistive sensors. Thus, the WB sensor exhibits a fast response and recovery time (~1 s), and temperature-invariant behaviors over a broad range of temperatures up to 180 °C, which is likely because of the self-calibrating and error correction capabilities of the WB circuit itself.
Keywords :
II-VI semiconductors; calibration; error correction; humidity sensors; measurement errors; nanorods; nanosensors; thermal stability; wide band gap semiconductors; zinc compounds; WB circuit; WB-based sensor; Wheatstone bride; ZnO; error correction; humidity sensor; nanorods; recovery time; resistive sensor; response time; self-calibration; thermal stability; Humidity; Sensitivity; Sensor phenomena and characterization; Temperature sensors; Time factors; Zinc oxide; Wheatstone bridge; humidity sensor; humidity sensor.; nanorods; zinc oxide;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2014.2335231