DocumentCode
1760441
Title
Molecular Doping of Multilayer
Field-Effect Transistors: Reduction in Sheet and Contact Resistances
Author
Yuchen Du ; Han Liu ; Neal, A.T. ; Mengwei Si ; Ye, Peide D.
Author_Institution
Birck Nanotechnol. Center, Purdue Univ., West Lafayette, IN, USA
Volume
34
Issue
10
fYear
2013
fDate
Oct. 2013
Firstpage
1328
Lastpage
1330
Abstract
For the first time, polyethyleneimine (PEI) doping on multilayer MoS2 field-effect transistors is investigated. A 2.6 times reduction in sheet resistance and 1.2 times reduction in contact resistance have been achieved. The enhanced electrical characteristics are also reflected in a 70% improvement in ON-current and 50% improvement in extrinsic field-effect mobility. The threshold voltage confirms a negative shift upon the molecular doping. All studies demonstrate the feasibility of PEI molecular doping in MoS2 transistors and its potential applications in layer-structured semiconducting 2-D crystals.
Keywords
contact resistance; field effect transistors; molybdenum compounds; polymers; semiconductor doping; MoS2; PEI doping; PEI molecular doping; contact resistances; enhanced electrical characteristics; extrinsic field-effect mobility; layer-structured semiconducting 2D crystals; multilayer field-effect transistors; polyethyleneimine doping; sheet resistance reduction; Contact resistance; Doping; Field effect transistors; Graphene; Resistance; Threshold voltage; ${rm MoS}_{2}$ ; Contact resistance; MOSFET; doping; sheet resistance; threshold voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2013.2277311
Filename
6585740
Link To Document