DocumentCode :
1760889
Title :
Ultrasonic characteristic of phase shift of layered structure and the determination of layer thickness
Author :
Gui-jin Yao ; Hai-rong Zhang ; Ke-xie Wang
Author_Institution :
Coll. of Commun. Eng., Jilin Univ., Changchun, China
Volume :
60
Issue :
12
fYear :
2013
fDate :
Dec. 2013
Firstpage :
2545
Lastpage :
2552
Abstract :
For the ultrasonic normally-incident reflected method, the phase shift of the mid-layer in a multi-layered structure has been theoretically derived and expressed as a sum form of the measured phase shift and the crossing phase shift. Using the sum form, the characteristics of phase shifts of a linear-viscoelastic layer on the two different elastic substrates of half-space of the infinite extent are first analyzed. By the replacement of phase shift of the upper elastic substrate with the corresponding measured phase shift, the substitution function of the input acoustical impedance of a next inaccessible layer has been developed. It is concluded that the corresponding relation of the layer phase shift with the minima/maxima of the absolute value of the input acoustical impedance of the inaccessible layer is repeated by those of the substitution function. Without giving the substrate thickness and considering the introduced misalignment and distortion problems, based on the corresponding relation, the thickness of the inaccessible layer can be determined by searching the frequencies of the minima/ maxima of the absolute value of the substitution function.
Keywords :
acoustic impedance; multilayers; thickness measurement; ultrasonic measurement; ultrasonic reflection; acoustical impedance; distortion problem; elastic substrate; layer thickness determination; misalignment; multilayered structure; phase shift; substitution function; ultrasonic characteristic; ultrasonic normally incident reflected method; Acoustic distortion; Acoustics; Frequency measurement; Impedance; Phase measurement; Substrates; Thickness measurement;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2013.2853
Filename :
6666075
Link To Document :
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