DocumentCode
1760944
Title
Multifunction thermopile sensors fabricated with a MEMS-compatible process
Author
Li-min Sin ; Tai-Tou Pan ; Chun-Wei Tsai ; Chia-feng Chou ; Jia-qi Hong ; Jui-che Tsai
Author_Institution
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Volume
26
Issue
2
fYear
2013
fDate
41395
Firstpage
242
Lastpage
247
Abstract
In this paper, we present micromachined multifunction thermopile sensors based on the Seebeck effect. A single sensor is able to perform measurement on temperature, pressure, humidity, and percentage of a gas constituent. Three different designs are employed and compared.
Keywords
microsensors; temperature measurement; thermopiles; MEMS; Seebeck effect; gas percentage measurement; humidity measurement; micromachined multifunction thermopile sensors; pressure measurement; temperature measurement; Gas detectors; Heating; Humidity; Sensitivity; Temperature sensors; Gas constituent percentage sensor; humidity sensor; multifunction thermopile sensor; pressure sensor; temperature sensor;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2013.2253137
Filename
6481460
Link To Document