Title :
Multifunction thermopile sensors fabricated with a MEMS-compatible process
Author :
Li-min Sin ; Tai-Tou Pan ; Chun-Wei Tsai ; Chia-feng Chou ; Jia-qi Hong ; Jui-che Tsai
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
In this paper, we present micromachined multifunction thermopile sensors based on the Seebeck effect. A single sensor is able to perform measurement on temperature, pressure, humidity, and percentage of a gas constituent. Three different designs are employed and compared.
Keywords :
microsensors; temperature measurement; thermopiles; MEMS; Seebeck effect; gas percentage measurement; humidity measurement; micromachined multifunction thermopile sensors; pressure measurement; temperature measurement; Gas detectors; Heating; Humidity; Sensitivity; Temperature sensors; Gas constituent percentage sensor; humidity sensor; multifunction thermopile sensor; pressure sensor; temperature sensor;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2013.2253137
