Plastic Deformation Study of Vertical Zinc Oxide Nanowires for Polymer Cantilever-Based Sensor Applications

Author

Ray, Priyadip ; Nathawat, Rashi ; Apte, Prakash R. ; Rao, Valipe Ramgopal

Author_Institution

Dept. of Electr. Eng., Indian Inst. of Technol. Bombay, Mumbai, India

Volume

13

Issue

4

fYear

2014

fDate

July 1 2014

Firstpage

630

Lastpage

633

Abstract

In this letter, the mechanical properties of piezoelectric ZnO nanowire (NW) films have been measured using a nanoindentation technique. We demonstrated a fabrication process to embed this NW film inside a polymeric (SU-8) cantilever. Mechanical properties of this SU-8/ZnO NW film and cantilever have been measured. The ZnO NWs have been grown vertically using a low-temperature chemical synthesis. The observed value of Young´s modulus for ZnO NW is in the range 72-93 GPa. After embedding this NW film inside a polymer matrix, the Young´s modulus value was reduced to the range 5-19 GPa. The mechanical behavior of the NW-embedded cantilever has also been investigated using the nanoindentation technique. These cantilevers have been shown to be suitable for surface stress-sensing applications.

Keywords

II-VI semiconductors; Young´s modulus; cantilevers; filled polymers; nanofabrication; nanoindentation; nanowires; piezoelectric thin films; plastic deformation; semiconductor growth; semiconductor thin films; thin film sensors; wide band gap semiconductors; zinc compounds; NW-embedded cantilever; SU-8 cantilever; Young´s modulus; ZnO; low-temperature chemical synthesis; mechanical properties; nanoindentation technique; piezoelectric nanowire films; plastic deformation; polymer cantilever-based sensor applications; pressure 5 GPa to 19 GPa; pressure 72 GPa to 93 GPa; surface stress-sensing applications; vertical growth; vertical zinc oxide nanowires; Encapsulation; Films; Force; Nanowires; Young´s modulus; Zinc oxide; Mechanical; ZnO; nanowire (NW); sensor;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2014.2320554

Filename

6807711