DocumentCode
1761318
Title
A Simplified Method of Making Flexible Blue LEDs on a Plastic Substrate
Author
Jung-Hun Seo ; Jing Li ; Jaeseong Lee ; Shaoqin Gong ; Jingyu Lin ; Hongxing Jiang ; Zhenqiang Ma
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Wisconsin-Madison, Madison, WI, USA
Volume
7
Issue
2
fYear
2015
fDate
42095
Firstpage
1
Lastpage
7
Abstract
A much-simplified method of making flexible GaN blue light-emitting diode (LED) array on a plastic substrate was demonstrated. A sticky elastomeric stamp was first brought into contact with prefabricated GaN LED array on a sapphire substrate. Laser liftoff was applied by shining laser light through the sapphire substrate. The released LED array sitting on the stamp was transferred to a polyethylene terephthalate substrate that was coated with an adhesive layer to finish the fabrication process. Careful investigation of the built-in stress in the GaN LED layer using Raman spectroscopy revealed that the maximum stress that allows for intact GaN LED layer release and transfer was 0.7 GPa. The method drastically simplifies the cumbersome conventional GaN layer transferring method while preserving the original layout of the GaN LED array. Due to its simple and practical characteristics, the method is expected to greatly facilitate the development of versatile transferrable GaN LED applications on various substrates at a much-reduced cost.
Keywords
III-V semiconductors; Raman spectra; elastomers; gallium compounds; integrated optoelectronics; light emitting diodes; semiconductor device manufacture; wide band gap semiconductors; Al2O3; GaN; Raman spectroscopy; built-in stress; flexible blue LED array; laser liftoff; light-emitting diode; plastic substrate; polyethylene terephthalate substrate; sapphire substrate; sticky elastomeric stamp; Arrays; Fabrication; Gallium nitride; Light emitting diodes; Positron emission tomography; Stress; Substrates; Direct transfer printing; GaN LEDs; Laser lift-off; direct transfer printing; laser liftoff;
fLanguage
English
Journal_Title
Photonics Journal, IEEE
Publisher
ieee
ISSN
1943-0655
Type
jour
DOI
10.1109/JPHOT.2015.2412459
Filename
7058343
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