Title :
Characterization of a GaN Lamb-Wave Sensor for Liquid-Based Mass Sensing Applications
Author :
Pantazis, Alexandros K. ; Konstantinidis, G. ; Gizeli, Electra
Author_Institution :
Biosensors Lab., IESL-FORTH, Heraklion, Greece
Abstract :
Lamb-wave acoustic devices have been proposed as a promising platform for sensing applications. In this paper, the performance of a GaN Lamb wave device as a liquid-based mass sensor is studied with respect to the effect of environmental parameters to the device performance, namely, the liquid flow-rate, device temperature, and presence of a thin gold film deposited on the GaN membrane.
Keywords :
III-V semiconductors; gallium compounds; gold; mass measurement; membranes; surface acoustic wave sensors; surface acoustic wave transducers; thin film sensors; wide band gap semiconductors; GaN-Au; Lamb-wave acoustic device; environmental parameter; lamb-wave sensor; liquid flow-rate; liquid-based mass sensing application; membrane; thin gold film deposition; Acoustics; Biomembranes; Biosensors; Gallium nitride; Gold; Temperature sensors; Acoustic device; GaN; biosensor; lamb wave device; protein sensing;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2013.2291393
