Title :
RF Probe Technology: History and Selected Topics
Author :
Rumiantsev, Andrej ; Doerner, Ralf
Author_Institution :
Brandenburg Univ. of Technol. (BTU), Cottbus, Germany
Abstract :
Today, radio-frequency (RF) wafer probes play an important role in almost every step of the RF products lifecycle: from technology development, model parameter extraction, design verification, and debug to small-scale and final production test. By using RF probes, it became possible to measure true characteristics of the RF components at the wafer level. This halved research and development times and lowered the enormous costs of developing new products.
Keywords :
probes; semiconductor device measurement; RF probe technology; design verification; history; model parameter extraction; radiofrequency wafer probes; History; Microwave measurement; Probes; Radio frequency; Wafer scale integration;
Journal_Title :
Microwave Magazine, IEEE
DOI :
10.1109/MMM.2013.2280241