DocumentCode :
1762454
Title :
Achieving reproducibility needed for manufacturing semiconductor tunnel devices
Author :
Shao, Chengcheng ; Sexton, James ; Missous, Mohamed ; Kelly, Michael J.
Author_Institution :
Dept. of Eng., Univ. of Cambridge, Cambridge, UK
Volume :
49
Issue :
10
fYear :
2013
fDate :
May 9 2013
Firstpage :
674
Lastpage :
675
Abstract :
Fifty years after tunnelling through semiconductor heterojunctions was originally investigated, the present authors are the first to demonstrate the required reproducibility, in wafer, between wafers in a given growth run, and from run to run, of the electrical properties required for manufacturing a microwave and millimetre-wave detector based on electron tunnelling through a thin semiconductor tunnel barrier layer.
Keywords :
microwave detectors; millimetre wave detectors; semiconductor device manufacture; electrical properties; microwave-wave detector manufacturing; millimetre-wave detector manufacturing; semiconductor heterojunctions; semiconductor tunnel device manufacturing; thin semiconductor tunnel barrier layer;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el.2013.0782
Filename :
6528819
Link To Document :
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