Theoretical Kinetics Investigation of Xenon Dielectric Barrier Discharge for Excimer Lamp

This paper presents a homogeneous study of xenon dielectric barrier discharge (DBD). The model, including plasma chemistry, electrical circuit, and Boltzmann equation modules, investigates the electrical and physical characteristics of high-pressure DBDs. The model is applied in the case of a sinusoidal voltage at period frequency of 50 kHz and gas pressure of 400 torr. First, we have analyzed the temporal evolutions of the plasma voltage, the current density and the species concentrations. Then, the physical model validity is checked by comparing the model results with a theoretical work. The effect of the kinetic scheme on the electrical parameters, the species concentration, and the total lamp efficiency are also investigated and discussed.