DocumentCode
1763358
Title
Ultra-Thin Silicon Nitride X-Ray Windows
Author
Torma, Pekka T. ; Sipila, H.J. ; Mattila, Marco ; Kostamo, Pasi ; Kostamo, Jari ; Kostamo, Esa ; Lipsanen, H. ; Nelms, Nick ; Shortt, Brian ; Bavdaz, Marcos ; Laubis, Christian
Author_Institution
Dept. of Micro-& Nanosci., Aalto Univ., Aalto, Finland
Volume
60
Issue
2
fYear
2013
fDate
41365
Firstpage
1311
Lastpage
1314
Abstract
We have demonstrated the fabrication of ultra-thin Si fine grid supported silicon nitride X-ray windows. These X-ray windows exhibit unequaled transmission of soft X-rays, high strength and excellent thermal stability. Measured soft X-ray transmission performance is significantly enhanced compared to typical polymer or beryllium based X-ray window structures. A double sided grid structure is used to demonstrate the scaling of the technology to larger areas.
Keywords
X-ray applications; silicon compounds; thermal stability; SiN; double sided grid structure; soft X-ray transmission measurement; thermal stability; ultra thin X-ray window structures; Attenuation; Diamonds; Polymers; Silicon; Silicon compounds; Thermal stability; Thermal stresses; Optical films; X-ray applications; X-ray detectors; space technology;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.2013.2243754
Filename
6482282
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