Title :
Ultra-Thin Silicon Nitride X-Ray Windows
Author :
Torma, Pekka T. ; Sipila, H.J. ; Mattila, Marco ; Kostamo, Pasi ; Kostamo, Jari ; Kostamo, Esa ; Lipsanen, H. ; Nelms, Nick ; Shortt, Brian ; Bavdaz, Marcos ; Laubis, Christian
Author_Institution :
Dept. of Micro-& Nanosci., Aalto Univ., Aalto, Finland
Abstract :
We have demonstrated the fabrication of ultra-thin Si fine grid supported silicon nitride X-ray windows. These X-ray windows exhibit unequaled transmission of soft X-rays, high strength and excellent thermal stability. Measured soft X-ray transmission performance is significantly enhanced compared to typical polymer or beryllium based X-ray window structures. A double sided grid structure is used to demonstrate the scaling of the technology to larger areas.
Keywords :
X-ray applications; silicon compounds; thermal stability; SiN; double sided grid structure; soft X-ray transmission measurement; thermal stability; ultra thin X-ray window structures; Attenuation; Diamonds; Polymers; Silicon; Silicon compounds; Thermal stability; Thermal stresses; Optical films; X-ray applications; X-ray detectors; space technology;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.2013.2243754
