Title :
Planar Hall Effect Sensors With Subnanotesla Resolution
Author :
Grosz, Asaf ; Mor, V. ; Paperno, Eugene ; Amrusi, S. ; Faivinov, I. ; Schultz, Michael ; Klein, Liviu
Author_Institution :
Dept. of Electr. & Comput. Eng., Ben-Gurion Univ. of the Negev, Beer-Sheva, Israel
Abstract :
We report the fabrication of elliptical planar Hall effect sensors made of Permalloy with response determined by shape-induced uniaxial anisotropy. By using ac excitation and by optimizing the sensor thickness and the amplitude of the excitation current, we have obtained a magnetic field resolution which is better than 600 pT/ √Hz at 1 Hz and close to 1 nT/ √Hz at 0.1 Hz. We discuss possible routes for further improvement of the obtained resolution.
Keywords :
Hall effect devices; Permalloy; magnetic sensors; optimisation; FeNi; Permalloy; ac excitation; elliptical planar Hall effect sensor fabrication; excitation current amplitude; frequency 0.1 Hz; frequency 1 kHz; magnetic field resolution; optimization; resolution improvement; sensor thickness; shape-induced uniaxial anisotropy; subnanotesla resolution; Hall effect; Magnetic anisotropy; Magnetic noise; Magnetic sensors; Noise; Thermal sensors; Magnetic instruments, magnetic sensors; planar Hall effect; resolution; sensor; subnanotesla;
Journal_Title :
Magnetics Letters, IEEE
DOI :
10.1109/LMAG.2013.2276551
