DocumentCode :
1763617
Title :
Design and Characterization of Micro Thermoelectric Cross-Plane Generators With Electroplated {\\rm Bi}_{2}{\\rm Te}_{3} , {\\</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Author : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>Roth, R. ; Rostek, R. ; Cobry, K. ; Kohler, Christoph ; Groh, Moritz ; Woias, P.</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Author_Institution : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>Lab. for the Design of Microsyst., Univ. of Freiburg, Freiburg, Germany</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Volume : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>23</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Issue : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>4</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>fYear : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>2014</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>fDate : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>Aug. 2014</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Firstpage : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>961</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Lastpage : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>971</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Abstract : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>We demonstrate and discuss the fabrication of cross-plane microthermoelectric generators with electrochemically deposited thermoelectric materials. A new process based on two layers of photoresist is presented to deposit the legs on the final substrate. The n-type Bi<sub>2</sub>Te<sub>3</sub>, Cu, and p-type Sb<sub>x</sub>Te<sub>y</sub> are integrated into the generator. The deposition of antimony telluride is performed to the largest thickness reported to date. The influence of thermal annealing on the material properties is studied. A new flip-chip reflow soldering process with Bi<sub>57</sub>Sn<sub>42</sub>Ag<sub>1</sub> soldering paste is presented that allows for enhanced thermal coupling of the generators. The manufactured generators are electrically and thermally fully characterized. They generate up to 1.63 μW cm<sup>-2</sup> K<sup>-2</sup>, which corresponds to a maximum power density of 2434.4 μW cm<sup>-2</sup>.</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Keywords : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>annealing; antimony compounds; bismuth compounds; electroplating; microfabrication; photoresists; reflow soldering; thermoelectric conversion; tin compounds; Bi<sub>2</sub>Te<sub>3</sub>; Bi<sub>57</sub>Sn<sub>42</sub>Ag; Sb<sub>x</sub>Te<sub>y</sub>; electrochemically deposited thermoelectric materials; flip-chip reflow soldering process; microthermoelectric cross-plane generators; photoresist layers; soldering paste; thermal annealing; thermal coupling; Annealing; Generators; Gold; Resists; Soldering; Substrates; ${rm Bi}_{2}{rm Te}_{3}$; ${rm Sb}_{2}{rm Te}_{3}$; 3-D microstructure; Bi₂Te₃; SU; SU-8; Sb₂Te₃; electrochemical deposition; energy harvesting; reflow soldering; reflow soldering.; thermoelectric generator;</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>fLanguage : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>English</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Journal_Title : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>Microelectromechanical Systems, Journal of</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Publisher : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>ieee</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>ISSN : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>1057-7157</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Type : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>jour</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>DOI : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>10.1109/JMEMS.2014.2303198</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Filename : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>6739106</div> </div> <div class='row'> <div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Link To Document : </div><div class='valueDiv leftDirection leftAlign fullRecValueEnglish col-xs-8 col-sm-10'><a href='https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1763617' target='_blank'>https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1763617</a></div> </div> </div> <div class='leftDiv labelDiv leftAlign backLinkEnglish'><a href='javascript:history.back()'><img src='../CSS/Back.png' class='backImage' alt=