DocumentCode :
1764111
Title :
Carbon dioxide resistive sensor based on titanium oxide nanowires doped with potassium
Author :
Inhee Lee
Author_Institution :
Globalfoundries, Malta, NY, USA
Volume :
9
Issue :
4
fYear :
2014
fDate :
41730
Firstpage :
248
Lastpage :
250
Abstract :
Potassium-doped titanium oxide (TiO2) nanowires are fabricated by the moisture-assisted, direct oxidation of a thin film of titanium at 650°C. The influence of the fabrication conditions on the structure and morphology of the nanowires was investigated. It was shown that the presence of potassium (K) is necessary for the formation of the nanowires. The density of growth of the nanowires was high, and the lengths of the nanowires were tens of micrometres. The K-doped TiO2 nanowires showed the possibility of use as a sensing material because of their significant and consistent response to responding to carbon dioxide (CO2) gas. In addition, H2 plasma treatment improved the sensitivity of the CO2 gas sensor made of K-doped TiO2 nanowires. Although the sensing mechanism is not clear, this development suggests opportunities for the fabrication of simple and inexpensive CO2 microsensors with low power consumption.
Keywords :
carbon compounds; gas sensors; microfabrication; microsensors; nanofabrication; nanosensors; nanowires; oxidation; plasma materials processing; potassium; titanium compounds; CO2; H2 plasma treatment; TiO2:K; carbon dioxide gas; carbon dioxide resistive sensor; gas sensor; microsensors; moisture-assisted direct oxidation; potassium-doped titanium oxide nanowires; power consumption; sensing material; temperature 650 degC; titanium thin film;
fLanguage :
English
Journal_Title :
Micro & Nano Letters, IET
Publisher :
iet
ISSN :
1750-0443
Type :
jour
DOI :
10.1049/mnl.2013.0718
Filename :
6808610
Link To Document :
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