Title :
Carbon dioxide resistive sensor based on titanium oxide nanowires doped with potassium
Author_Institution :
Globalfoundries, Malta, NY, USA
Abstract :
Potassium-doped titanium oxide (TiO2) nanowires are fabricated by the moisture-assisted, direct oxidation of a thin film of titanium at 650°C. The influence of the fabrication conditions on the structure and morphology of the nanowires was investigated. It was shown that the presence of potassium (K) is necessary for the formation of the nanowires. The density of growth of the nanowires was high, and the lengths of the nanowires were tens of micrometres. The K-doped TiO2 nanowires showed the possibility of use as a sensing material because of their significant and consistent response to responding to carbon dioxide (CO2) gas. In addition, H2 plasma treatment improved the sensitivity of the CO2 gas sensor made of K-doped TiO2 nanowires. Although the sensing mechanism is not clear, this development suggests opportunities for the fabrication of simple and inexpensive CO2 microsensors with low power consumption.
Keywords :
carbon compounds; gas sensors; microfabrication; microsensors; nanofabrication; nanosensors; nanowires; oxidation; plasma materials processing; potassium; titanium compounds; CO2; H2 plasma treatment; TiO2:K; carbon dioxide gas; carbon dioxide resistive sensor; gas sensor; microsensors; moisture-assisted direct oxidation; potassium-doped titanium oxide nanowires; power consumption; sensing material; temperature 650 degC; titanium thin film;
Journal_Title :
Micro & Nano Letters, IET
DOI :
10.1049/mnl.2013.0718