DocumentCode
1765137
Title
Pull-in Voltage Estimation of Microcantilever Beams With Effects of Residual Stress Gradients and Capacitance Fringing
Author
Kuang-Shun Ou ; Kuo-Shen Chen
Author_Institution
Dept. of Mech. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Volume
14
Issue
1
fYear
2014
fDate
41699
Firstpage
577
Lastpage
579
Abstract
Pull-in characteristics of microcantilevers subjected to both residual stress gradients and electrostatic fringing are investigated by extending the previous JMEMS work by Ou using an energy approach. The analysis results agree with those performed by finite-element simulation very well. Finally, a semi-analytical engineering formula is also presented for MEMS design engineers.
Keywords
beams (structures); cantilevers; finite element analysis; internal stresses; micromechanical devices; JMEMS work; MEMS design engineers; capacitance fringing; electrostatic fringing; energy approach; finite-element simulation; microcantilever beams; pull-in characteristics; pull-in voltage estimation; residual stress gradients; Atmospheric modeling; Electrostatics; Finite element analysis; Micromechanical devices; Residual stresses; Structural beams; Energy method; fringing effect; microcantilevers; pull-in; residual stress gradient;
fLanguage
English
Journal_Title
Device and Materials Reliability, IEEE Transactions on
Publisher
ieee
ISSN
1530-4388
Type
jour
DOI
10.1109/TDMR.2013.2279891
Filename
6587523
Link To Document