Title :
Molecular Electronic Transducer-Based Low-Frequency Accelerometer Fabricated With Post-CMOS Compatible Process Using Droplet as Sensing Body
Author :
Hai Huang ; Mengbing Liang ; Rui Tang ; Oiler, Jonathon ; Hongyu Yu
Author_Institution :
Sch. of Electr., Comput. & Energy Eng., Arizona State Univ., Tempe, AZ, USA
Abstract :
This letter reports a low-frequency micro-accelerometer implementing a liquid-state sensing body, based on molecular electronic transducer (MET) in post-CMOS compatible microfabrication technology. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body, and a MET electrode configuration as the sensing read-out mechanism. The promising and unique performance of the MET design allows the fabricated device to achieve 10.8 V/G(G=9.81 m/s2) sensitivity at 20 Hz with nearly flat response over the frequency range from 1 to 50 Hz, and a low noise floor of 75 μG/√(Hz) at 20 Hz.
Keywords :
CMOS integrated circuits; accelerometers; drops; electrodes; electrolytes; encapsulation; microfabrication; microsensors; molecular electronics; oils; radiofrequency integrated circuits; MET electrode configuration; frequency 1 Hz to 50 Hz; liquid-state sensing body; low-frequency microaccelerometer fabrication; molecular electronic transducer; oil encapsulation; post-CMOS compatible microfabrication technology; sensing read-out mechanism; submicroliter electrolyte droplet; Acceleration; Accelerometers; Electrodes; Fabrication; Micromechanical devices; Sensitivity; Sensors; Accelerometer; electrolyte droplet; microelectromechanical systems (MEMS); molecular electronic transducer; post-CMOS compatible;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2013.2277541
