Molecular Electronic Transducer-Based Low-Frequency Accelerometer Fabricated With Post-CMOS Compatible Process Using Droplet as Sensing Body

Author

Hai Huang ; Mengbing Liang ; Rui Tang ; Oiler, Jonathon ; Hongyu Yu

Author_Institution

Sch. of Electr., Comput. & Energy Eng., Arizona State Univ., Tempe, AZ, USA

Volume

34

Issue

10

fYear

2013

fDate

Oct. 2013

Firstpage

1304

Lastpage

1306

Abstract

This letter reports a low-frequency micro-accelerometer implementing a liquid-state sensing body, based on molecular electronic transducer (MET) in post-CMOS compatible microfabrication technology. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body, and a MET electrode configuration as the sensing read-out mechanism. The promising and unique performance of the MET design allows the fabricated device to achieve 10.8 V/G(G=9.81 m/s²) sensitivity at 20 Hz with nearly flat response over the frequency range from 1 to 50 Hz, and a low noise floor of 75 μG/√(Hz) at 20 Hz.

Keywords

CMOS integrated circuits; accelerometers; drops; electrodes; electrolytes; encapsulation; microfabrication; microsensors; molecular electronics; oils; radiofrequency integrated circuits; MET electrode configuration; frequency 1 Hz to 50 Hz; liquid-state sensing body; low-frequency microaccelerometer fabrication; molecular electronic transducer; oil encapsulation; post-CMOS compatible microfabrication technology; sensing read-out mechanism; submicroliter electrolyte droplet; Acceleration; Accelerometers; Electrodes; Fabrication; Micromechanical devices; Sensitivity; Sensors; Accelerometer; electrolyte droplet; microelectromechanical systems (MEMS); molecular electronic transducer; post-CMOS compatible;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2013.2277541

Filename

6587528