Adaptive zero phase based internal model control for direct drive XY table

In direct drive XY table system, due to the load disturbance and parameter variation and parameter mismatch between the two axis of uncertainty factors will affect the contour machining precision, adaptive zero phase error tracking controller (ZPETC) combined with internal model control (IMC) control strategy is presented to control the tracking error, and cross-coupling control method is used to coordinate the movement of two axis control in order to improve the contour machining precision, thus to achieve the tracking error and contour error decreases at the same time. Adaptive ZPETC for a given trajectory has better tracking performance. Internal model control has good tracking of regulatory, the advantages of strong robustness, can eliminate the interference of unpredictable. The cross coupling control (CCC) method can effectively realize the dynamic contour error compensation, make the contour error minimum. The simulation results show that the designed control system has good tracking and robustness, can effectively improve the tracking accuracy and the contour accuracy.