A team at the University of Louisiana at Lafayette in the US have created a thin film of silica aerogel on a silicon wafer and have demonstrated its potential to make more efficient metal oxide semiconductor (MOX) gas sensors.
Keywords :
MIS devices; aerogels; gas sensors; semiconductor thin films; thin film sensors; MOX gas sensors; SiO2; metal-oxide semiconductor gas sensors; silicon wafer; thin film; ultra-insulator silica aerogel;
