• DocumentCode
    1766343
  • Title

    Basic Mechanisms of Threshold-Voltage Instability and Implications for Reliability Testing of SiC MOSFETs

  • Author

    Lelis, Aivars J. ; Green, Ron ; Habersat, Daniel B. ; El, Mooro

  • Author_Institution
    U.S. Army Res. Lab., Adelphi, MD, USA
  • Volume
    62
  • Issue
    2
  • fYear
    2015
  • fDate
    Feb. 2015
  • Firstpage
    316
  • Lastpage
    323
  • Abstract
    A review of the basic mechanisms affecting the stability of the threshold voltage in response to a bias-temperature stress is presented in terms of the charging and activation of near-interfacial oxide traps. An activation energy of approximately 1.1 eV was calculated based on new experimental results. Implications of these factors, including the recovery of some bias-temperature stress-activated defects, for improved device reliability testing are discussed.
  • Keywords
    MOSFET; semiconductor device reliability; semiconductor device testing; silicon compounds; wide band gap semiconductors; MOSFETs; SiC; activation energy; bias-temperature stress-activated defects; device reliability testing; near-interfacial oxide traps; threshold-voltage instability; Logic gates; MOSFET; Silicon carbide; Stress; Stress measurement; Temperature measurement; Tunneling; Oxide trap; power MOSFET; reliability; silicon carbide (SiC); threshold voltage; threshold voltage.;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2014.2356172
  • Filename
    6919327