DocumentCode
1766874
Title
RF MEMS control of planar microchamber for adaptive biosensing applications
Author
Palego, Cristiano ; Molinero, David ; Cunningham, Shawn ; Morris, Art ; Seth, Marten
Author_Institution
Sch. of Electron. Eng., Bangor Univ., Bangor, UK
fYear
2014
fDate
6-9 Oct. 2014
Firstpage
1040
Lastpage
1043
Abstract
Integration of radiofrequency micro-electromechanical (RF MEMS) tuning modules into a tested planar microchamber for agile biosensing pursposes is investigated. It is found that present MEMS chips enable enhancement of the achievable sensitivity in common sensing scenarios and without adding to technological complexity, although over a relatively narrow frequency range. Dedicated RF MEMS modules with higher capacitive resolution can be prospectively employed for even more flexible performance.
Keywords
biosensors; micromechanical devices; MEMS chips; RF MEMS control; RF MEMS tuning modules; adaptive biosensing applications; agile biosensing pursposes; capacitive resolution; common sensing scenarios; radiofrequency microelectromechanical tuning modules; technological complexity; tested planar microchamber; Biosensors; Impedance; Micromechanical devices; Radio frequency; Sensitivity; Tuning; Biological cells; bioimpedance; biosensors; micro-electromechanicl systems; microfluidics; switch; tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference (EuMC), 2014 44th European
Conference_Location
Rome
Type
conf
DOI
10.1109/EuMC.2014.6986616
Filename
6986616
Link To Document