Title :
1060nm Single-Mode Multi-wavelength VCSEL Array with Intra-Cavity Phase Tuning Layers
Author :
Kawakita, Y. ; Takaki, K. ; Funabashi, Masaki ; Imai, Suguru ; Kasukawa, A.
Author_Institution :
Yokohama R&D Labs., Furukawa Electr. Co., Ltd., Yokohama, Japan
Abstract :
We have demonstrated multi-wavelength VCSEL array operating at 1060nm with dielectric phase tuning layers. Uniform threshold currents of approximately 0.35mA were successfully realized over 16 channels (10nm wavelength span) by only four-step lithography and etching.
Keywords :
etching; laser cavity resonators; laser modes; laser tuning; quantum well lasers; semiconductor laser arrays; surface emitting lasers; dielectric phase tuning layers; etching; four-step lithography; intracavity phase tuning layers; single-mode multiwavelength VCSEL array; uniform threshold currents; wavelength 1060 nm; Arrays; Cavity resonators; Optical device fabrication; Optical interconnections; Tuning; Vertical cavity surface emitting lasers; Wavelength division multiplexing;
Conference_Titel :
Semiconductor Laser Conference (ISLC), 2014 International
Conference_Location :
Palma de Mallorca
Print_ISBN :
978-1-4799-5721-7
DOI :
10.1109/ISLC.2014.236
