• DocumentCode
    1768319
  • Title

    Developing a linear model of RF power generators with pseudo random binary signals (PRBS)

  • Author

    Haijun Fang ; Dianat, Sohail ; Mestha, Lalit K. ; Radomski, Aaron

  • Author_Institution
    ENI-Products Group, MKS Instrum., Rochester, NY, USA
  • fYear
    2014
  • fDate
    22-25 Oct. 2014
  • Firstpage
    1158
  • Lastpage
    1162
  • Abstract
    In this paper, we will present an approach developing a linear model of a radio frequency (RF) power generator by using pseudo random binary signals (PRBS). We will compare two linear models obtained respectively by the PRBS approach and a traditional modeling approach. The result shows that both approaches achieve a very similar model of the RF power generator. Moreover, it can be shown that the PRBS approach is easily implemented in FPGA (Field-Programmable Gate Array) and can be adapted for the on-line system identification.
  • Keywords
    AC-DC power convertors; field programmable gate arrays; plasma materials processing; plasma production; plasma radiofrequency heating; FPGA; PRBS; RF power generators; field-programmable gate array; linear model; on-line system identification; pseudo random binary signals; radiofrequency power generator; Estimation; Rails; Silicon; Power Systems; Radio Frequency (RF);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Control, Automation and Systems (ICCAS), 2014 14th International Conference on
  • Conference_Location
    Seoul
  • ISSN
    2093-7121
  • Print_ISBN
    978-8-9932-1506-9
  • Type

    conf

  • DOI
    10.1109/ICCAS.2014.6987734
  • Filename
    6987734