Exploiting a micro Pirani gauge for multifonction

In this paper, a micro Pirani gauge sensor is studied in the purpose to be exploited for multifunction. Based on the gauge´s experimental results, an adequate conditioning circuit and a single configurable CMOS readout have been proposed allowing exploiting the gauge in an original way for multi measurements. Furthermore, the proposed readout is designed in such a way that it offers the possibility to exploit transient response of the sensor, which, unlike the conventional way, extends the measurable pressure range remarkably beyond atmosphere. The proposed functionality has been confirmed by simulation results.