Title :
15 mW of CW emission at 193 nm using the crystal KBBF
Author :
Scholz, Matthias ; Opalevs, Dmitrijs ; Stuhler, Jurgen ; Leisching, Patrick ; Kaenders, Wilhelm ; Guiling Wang ; Xiaoyang Wang ; Rukang Li ; Chuangtian Chen
Author_Institution :
TOPTICA Photonics AG, Gräfelfing, Germany
Abstract :
We report on a narrow-band continuous-wave laser source in the deep-ultraviolet with an output power of > 15 mW at 193 nm. We see applications of this laser source in semiconductor metrology and high-resolution spectroscopy.
Keywords :
beryllium compounds; measurement by laser beam; potassium compounds; solid lasers; spectroscopy; CW emission; KBBF; crystal KBBF; deep-ultraviolet range; high-resolution spectroscopy; potassium fluoro-beryllo borate; power 15 mW; semiconductor metrology; wavelength 193 nm;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
