Title :
Microfabricated optically-pumped magnetometers
Author_Institution :
Time & Freq. Div., Nat. Inst. of Stand. & Technol., Boulder, CO, USA
Abstract :
The miniaturization of atomic devices with methods lent from microelectromechanical systems (MEMS) has enabled small, low-power high-performance sensors. Pioneered by the development of the chip-scale atomic clock, the technology has advanced to gyroscopes and optically-pumped magnetometers. At the heart of each device is a MEMS alkali vapor cell. It is integrated with micro-optical components, heaters, photodiodes, and lasers in a miniature package of less than 1cm3. MEMS fabrication can open the door for low-cost fabrication in large quantities and make atomic sensors manufacturable with lithographically-defined precision.
Keywords :
atomic clocks; gyroscopes; lasers; magnetometers; micro-optomechanical devices; microfabrication; microsensors; optical pumping; optical sensors; photodetectors; photodiodes; photolithography; MEMS alkali vapor cell; atomic device miniaturization; atomic sensor; chip-scale atomic clock; gyroscope; heater; laser; lithographically-defined precision; microelectromechanical system; microfabricated optically-pumped magnetometer; photodiode; Atomic clocks; Atomic measurements; Magnetometers; Micromechanical devices; Optical sensors; Physics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
