Title :
Opaque film metrology using PULSE Technology
Author :
Mehendale, Mahesh
Author_Institution :
Rudolph Technol., Flanders, NJ, USA
Abstract :
PULSE Technology™ involves generation and detection of acoustic waves in opaque layers using ultrafast laser pulses. Its application in advanced semiconductor and packaging industry for single and multi-layer thin film metrology is presented.
Keywords :
Young´s modulus; acoustic wave production; high-speed optical techniques; measurement by laser beam; mechanical variables measurement; photoacoustic effect; reflectivity; thickness measurement; PULSE technology; acoustic waves detection; acoustic waves generation; multi-layer thin film metrology; opaque film metrology; opaque layers; packaging industry; single-layer thin film metrology; ultrafast laser pulses; Copper; Electronics industry; Films; Metrology; Monitoring; Packaging; Semiconductor device measurement;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
