Title :
Micro-fluid channel based on ultralow-loss silicon crossing waveguide for various sensing
Author :
Zheng Wang ; Chakravarty, Sumit ; Subbaraman, Harish ; Xiaochuan Xu ; Donglei Fan ; Wang, Alan X. ; Chen, Ray T.
Author_Institution :
Mater. Sci. & Eng. Program, Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We experimentally demonstrate a new type of micro-fluid channel design with crossing optical waveguides that not only block any gaps in the microfluidic channels in one fabrication step but also enable nearly lossless optical propagation in the primary waveguides on a chip. Such designs are critical for all sensing applications where the analyte must be flowed over the sensor.
Keywords :
integrated optics; micro-optics; microfabrication; microfluidics; microsensors; optical design techniques; optical fabrication; optical losses; optical sensors; optical waveguides; silicon; Si; all sensing applications; analyte; microfluidic channel design; optical sensor; ultralow-loss silicon crossing optical waveguide; Arrayed waveguide gratings; Biomedical optical imaging; Microfluidics; Optical device fabrication; Optical sensors; Photonic crystals;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA