Title :
Monolithic three dimensional dielectrophoretic actuator for positioning optics fabricated by femtosecond laser
Author :
Tao Yang ; Bellouard, Yves
Author_Institution :
Dept. of Mech. Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Abstract :
We report a monolithic three dimensional dielectrophoretic micro-actuator fabricated by femtosecond laser in fused silica. Such actuators are useful for fine positioning of optical fibers and for introducing optomechanical coupling in waveguides.
Keywords :
electrophoresis; high-speed optical techniques; laser materials processing; micro-optomechanical devices; microactuators; microfabrication; optical fibre fabrication; silicon compounds; SiO2; femtosecond laser; fused silica; monolithic three-dimensional dielectrophoretic microactuator; optical fiber positioning; optical waveguides; optomechanical coupling; Dielectrophoresis; Electric fields; Force; Resonant frequency; Silicon compounds; Ultrafast optics; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
