Title :
Ultrafine control of partially loaded single plasmonic nanoantennas fabricated using e-beam lithography and helium ion beam milling
Author :
Yudong Wang ; Abb, Martina ; Boden, Stuart A. ; Aizpurua, Javier ; De Groot, C.H. ; Muskens, Otto L.
Author_Institution :
Nano Group, Univ. of Southampton, Southampton, UK
Abstract :
Plasmonic resonance shift between capacitive and conductive coupling of a partially loaded dimer antenna has been achieved by the ultrafine control of milling partial antenna gaps with nanometer precision using a helium ion beam microscope.
Keywords :
electron beam lithography; helium ions; ion beam lithography; metamaterial antennas; nanofabrication; nanophotonics; optical control; optical couplers; optical fabrication; plasmonics; capacitive coupling; conductive coupling; e-beam lithography; helium ion beam microscope; helium ion beam milling; nanometer precision; partially loaded single plasmonic nanoantenna fabrication; plasmonic resonance shift; ultrafine control; Bridge circuits; Helium; Ion beams; Milling; Plasmons; Scanning electron microscopy;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
