Title :
Enhanced plasmonic performance in ultrathin silver structures using Gas Cluster Ion Beam Irradiation
Author :
Ee Jin Teo ; Toyoda, Noriaki ; Chengyuan Yang ; Bing Wang ; Nan Zhang ; Bettiol, Andrew Anthony ; Jing Hua Teng
Author_Institution :
Inst. of Mater. Res. & Eng., Agency for Sci., Technol. & Res. (A*STAR), Singapore, Singapore
Abstract :
We demonstrate the use of Gas Cluster Ion Beam (GCIB) nanoprocessing technology for producing ultrathin silver waveguide and disk structures with smoother surfaces and wider grain sizes for enhanced surface plasmon propagation.
Keywords :
grain size; ion beam effects; metallic thin films; optical films; optical waveguides; silver; surface plasmons; Ag; GCIB; disk structures; enhanced plasmonic performance; enhanced surface plasmon propagation; gas cluster ion beam irradiation; grain size; nanoprocessing technology; smoother surfaces; ultrathin silver structures; ultrathin silver waveguide; Films; Optical surface waves; Plasmons; Rough surfaces; Surface morphology; Surface roughness; Surface waves;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
