Title :
Triangular nanobeam fabrication strategy for quantum photonic network realization in bulk diamond
Author :
Bayn, Igal ; Mouradian, Sara ; Luozhou Li ; Schroder, Tim ; Gaathon, Ophir ; Ming Lu ; Stein, Aaron ; Englund, Dirk
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
A triangular nanobeam architecture for a bulk-diamond quantum photonic networks based on silicon masking and angular etching is proposed and implemented. Cavities with Q>3×103 are demonstrated. S-bent interconnects for realizing a mm-scale network are introduced.
Keywords :
Q-factor; diamond; elemental semiconductors; etching; laser beams; nanophotonics; optical fabrication; quantum optics; silicon; C; Q-factor; S-bent interconnects; angular etching; bulk diamond; cavities; quantum photonic network realization; silicon masking; triangular nanobeam fabrication; Cavity resonators; Couplings; Diamonds; Fabrication; Photonic crystals; Photonics; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
