Nanostructured Transparent Conducting Oxide films for polarization control with plasmonic metasurfaces

Author

Jongbum Kim ; Yang Zhao ; Dutta, Arin ; Choudhury, Sajid Muhaimin ; Kildishev, Alexander V. ; Alu, Andrea ; Boltasseva, Alexandra

Author_Institution

Birck Nanotechnol. Center, Purdue Univ., West Lafayette, IN, USA

fYear

2014

fDate

8-13 June 2014

Firstpage

1

Lastpage

2

Abstract

Transparent Conducting Oxides (TCOs) enable the realization of practical plasmonic and metamaterial devices at the telecommunication frequency due to their low optical loss and CMOS compatibility. By employing a conventional dry-etching process, we have fabricated GZO plasmonic waveplates, which convert linearly polarized light into circularly polarized light.

Keywords

II-VI semiconductors; etching; gallium; nanofabrication; nanostructured materials; plasmonics; semiconductor growth; semiconductor thin films; wide band gap semiconductors; zinc compounds; CMOS compatibility; GZO plasmonic waveplates; ZnO:Ga; circularly polarized light; dry-etching process; linearly polarized light; metamaterial device; nanostructured transparent conducting oxide films; optical loss; plasmonic metasurfaces; polarization control; telecommunication frequency; Communications technology; Metamaterials; Nanoscale devices; Optical films; Optical polarization; Plasmons;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics (CLEO), 2014 Conference on

Conference_Location

San Jose, CA

Type

conf

Filename

6988435