Title :
Nanostructured Transparent Conducting Oxide films for polarization control with plasmonic metasurfaces
Author :
Jongbum Kim ; Yang Zhao ; Dutta, Arin ; Choudhury, Sajid Muhaimin ; Kildishev, Alexander V. ; Alu, Andrea ; Boltasseva, Alexandra
Author_Institution :
Birck Nanotechnol. Center, Purdue Univ., West Lafayette, IN, USA
Abstract :
Transparent Conducting Oxides (TCOs) enable the realization of practical plasmonic and metamaterial devices at the telecommunication frequency due to their low optical loss and CMOS compatibility. By employing a conventional dry-etching process, we have fabricated GZO plasmonic waveplates, which convert linearly polarized light into circularly polarized light.
Keywords :
II-VI semiconductors; etching; gallium; nanofabrication; nanostructured materials; plasmonics; semiconductor growth; semiconductor thin films; wide band gap semiconductors; zinc compounds; CMOS compatibility; GZO plasmonic waveplates; ZnO:Ga; circularly polarized light; dry-etching process; linearly polarized light; metamaterial device; nanostructured transparent conducting oxide films; optical loss; plasmonic metasurfaces; polarization control; telecommunication frequency; Communications technology; Metamaterials; Nanoscale devices; Optical films; Optical polarization; Plasmons;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
