Mechanical analysis and control of a novel nanopositioner

In this paper, a novel one-dimensional PZT driven nanopositioner is designed based on triangle amplification principle, The nanopositioner is composed of various flexure hinges for the purposes of high precision positioning and simple mechanical structure. Mechanical analysis is provided from the perspectives of amplification ratio and stiffness, with which the first three modes of natural frequencies are obtained. Meanwhile, finite element analysis is also deployed for verification purposes. Due to the existence of hysteresis nonlinearity of the PZT actuator, the classical Preisach method is implemented to model the nonlinear characteristics, and an H_∞ robust controller is synthesized for high precision positioning. Real time implementations of the proposed algorithm demonstrate good performance of the nanopositioning system.