DocumentCode
1770455
Title
Silicon microreflector created by single ultrafast laser pulse
Author
Jingyu Zhang ; Drevinskas, Rokas ; Beresna, Martynas ; Gecevicius, Mindaugas ; Kazansky, Peter G.
Author_Institution
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
Directly written structure created on the surface of silicon by the single pulse femtosecond laser irradiation are observed to function as microreflector. The smooth surface of the structure is a result of molten material flow.
Keywords
elemental semiconductors; laser materials processing; micro-optics; optical elements; optical fabrication; silicon; Si; directly written structure; molten material flow; silicon microreflector; single pulse femtosecond laser irradiation; single ultrafast laser pulse; smooth surface; Laser beams; Lasers; Radiation effects; Scanning electron microscopy; Silicon; Ultrafast electronics; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6988924
Link To Document