Title :
Silicon microreflector created by single ultrafast laser pulse
Author :
Jingyu Zhang ; Drevinskas, Rokas ; Beresna, Martynas ; Gecevicius, Mindaugas ; Kazansky, Peter G.
Author_Institution :
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
Abstract :
Directly written structure created on the surface of silicon by the single pulse femtosecond laser irradiation are observed to function as microreflector. The smooth surface of the structure is a result of molten material flow.
Keywords :
elemental semiconductors; laser materials processing; micro-optics; optical elements; optical fabrication; silicon; Si; directly written structure; molten material flow; silicon microreflector; single pulse femtosecond laser irradiation; single ultrafast laser pulse; smooth surface; Laser beams; Lasers; Radiation effects; Scanning electron microscopy; Silicon; Ultrafast electronics; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
