• DocumentCode
    1770820
  • Title

    Dynamic displacement measurement system with auto calibration using deeply-phase modulated light

  • Author

    Tanaka, Yuichi ; Miyata, Naoyuki ; Ito, Takao ; Kurokawa, Takashi

  • Author_Institution
    Div. of Adv. Electr. & Electron. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate dynamic displacement measurement with phase-modulated light. Auto calibration using deep phase modulation makes the measurement independent of driving conditions of the modulator. Displacement of several tens nm for more-than-1-MHz vibration is successfully measured.
  • Keywords
    calibration; displacement measurement; optical modulation; phase modulation; auto calibration; deeply-phase modulated light; driving conditions; dynamic displacement measurement system; modulator; vibration; Displacement measurement; Frequency measurement; Frequency modulation; Phase modulation; Vibration measurement; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2014 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6989116
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1770820