Title :
Dynamic displacement measurement system with auto calibration using deeply-phase modulated light
Author :
Tanaka, Yuichi ; Miyata, Naoyuki ; Ito, Takao ; Kurokawa, Takashi
Author_Institution :
Div. of Adv. Electr. & Electron. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
Abstract :
We demonstrate dynamic displacement measurement with phase-modulated light. Auto calibration using deep phase modulation makes the measurement independent of driving conditions of the modulator. Displacement of several tens nm for more-than-1-MHz vibration is successfully measured.
Keywords :
calibration; displacement measurement; optical modulation; phase modulation; auto calibration; deeply-phase modulated light; driving conditions; dynamic displacement measurement system; modulator; vibration; Displacement measurement; Frequency measurement; Frequency modulation; Phase modulation; Vibration measurement; Vibrations;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
