• DocumentCode
    1770890
  • Title

    Electrical characterization of n+-InSb/p-Si heterojunctions grwon by surface reconstruction controlled epitaxy

  • Author

    Kimura, K. ; Hosotani, K. ; Ito, T. ; Shimoyama, H. ; Sakamoto, T. ; Mori, M. ; Maezawa, K.

  • Author_Institution
    Grad. Sch. of Sci. & Eng., Univ. of Toyama, Toyama, Japan
  • fYear
    2014
  • fDate
    19-20 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    This paper discusses the characteristics of the InSb/Si heterojunctions. Thin epitaxial layers of the InSb were grown on p-Si substrate by using the surface reconstruction controlled epitaxy. This epitaxial growth technique permits us to grow high quality InSb on Si (111) surface. The n-InSb/p-Si heterojunction pn diodes were fabricated with these samples, and characterized by current-voltage, and capacitance-voltage measurements. The conduction and valence band discontinuities were estimated from these results, and they were discussed compared to those obtained from the electron affinity rule.
  • Keywords
    III-V semiconductors; conduction bands; elemental semiconductors; indium compounds; molecular beam epitaxial growth; p-n heterojunctions; semiconductor diodes; semiconductor epitaxial layers; semiconductor growth; silicon; surface reconstruction; valence bands; InSb-Si; Si; Si (111) surface; capacitance-voltage measurements; conduction band discontinuities; current-voltage measurements; electrical characterization; electron affinity; epitaxial growth; epitaxial layers; heterojunction p-n diodes; p-Si substrate; surface reconstruction controlled epitaxy; valence band discontinuities; Capacitance-voltage characteristics; Heterojunctions; Molecular beam epitaxial growth; Silicon; Substrates; Surface reconstruction; InSb; Si; conduction band discontinuity; heterojunction; valence band discontinuity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Future of Electron Devices, Kansai (IMFEDK), 2014 IEEE International Meeting for
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-1-4799-3614-4
  • Type

    conf

  • DOI
    10.1109/IMFEDK.2014.6867066
  • Filename
    6867066