Title :
Ultrahigh frequency surface acoustic wave modulation of optical resonators
Author :
Tadesse, Semere A. ; Mo Li
Author_Institution :
Sch. of Phys. & Astron., Univ. of Minnesota, Minneapolis, MN, USA
Abstract :
A piezoelectric aluminum nitride film on oxidized silicon wafer is used to realize high frequency surface acoustic wave devices. Optical ring resonator is integrated with the surface acoustic wave device to demonstrate a high speed acousto-optic modulation.
Keywords :
acousto-optical modulation; aluminium compounds; elemental semiconductors; integrated optics; optical resonators; piezoelectric thin films; silicon; surface acoustic wave devices; AlN-Si; high speed acousto-optic modulation; optical resonators; optical ring resonator; oxidized silicon wafer; piezoelectrc aluminum nitride film; surface acoustic wave devices; ultrahigh frequency surface acoustic wave modulation; Modulation; Optical ring resonators; Optical surface waves; Optical waveguides; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
