• DocumentCode
    1771229
  • Title

    Diffraction-assisted micropatterning of silicon surfaces by ns-laser irradiation

  • Author

    Mecalco, G. ; Acosta-Zepeda, C. ; Hernandez-Pozos, J.L. ; Batina, N. ; Morales-Reyes, I. ; Bonse, J. ; Haro-Poniatowski, E.

  • Author_Institution
    Dept. de Fis., Univ. Autonoma Metropolitana Iztapalapa, Mexico City, Mexico
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Single-pulse (532 nm, 10 ns) micropatterning of silicon surfaces through a pinhole is demonstrated using scanning electron and atomic force microscopy. The results are compared to the Fresnel diffraction theory and physical mechanisms are discussed.
  • Keywords
    atomic force microscopy; elemental semiconductors; laser materials processing; scanning electron microscopy; silicon; surface treatment; Fresnel diffraction theory; Si; atomic force microscopy; diffraction-assisted micropatterning; ns-laser irradiation; physical mechanisms; pinhole; scanning electron microscopy; silicon surfaces; single-pulse micropatterning; time 10 ns; wavelength 532 nm; Diffraction; Laser ablation; Scanning electron microscopy; Silicon; Surface emitting lasers; Surface morphology; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2014 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6989330
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1771229