Title :
Diffraction-assisted micropatterning of silicon surfaces by ns-laser irradiation
Author :
Mecalco, G. ; Acosta-Zepeda, C. ; Hernandez-Pozos, J.L. ; Batina, N. ; Morales-Reyes, I. ; Bonse, J. ; Haro-Poniatowski, E.
Author_Institution :
Dept. de Fis., Univ. Autonoma Metropolitana Iztapalapa, Mexico City, Mexico
Abstract :
Single-pulse (532 nm, 10 ns) micropatterning of silicon surfaces through a pinhole is demonstrated using scanning electron and atomic force microscopy. The results are compared to the Fresnel diffraction theory and physical mechanisms are discussed.
Keywords :
atomic force microscopy; elemental semiconductors; laser materials processing; scanning electron microscopy; silicon; surface treatment; Fresnel diffraction theory; Si; atomic force microscopy; diffraction-assisted micropatterning; ns-laser irradiation; physical mechanisms; pinhole; scanning electron microscopy; silicon surfaces; single-pulse micropatterning; time 10 ns; wavelength 532 nm; Diffraction; Laser ablation; Scanning electron microscopy; Silicon; Surface emitting lasers; Surface morphology; Surface topography;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
