Title :
Femtosecond laser tuning of Si microring resonators by surface amorphization through a thick SiO2 cladding
Author :
Bachman, D. ; Chen, Zhe ; Fedosejevs, Robert ; Tsui, Y.Y. ; Van, V.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada
Abstract :
Single femtosecond laser pulses are used to modify the surface of c-Si waveguides clad by SiO2 for permanent tuning of microring resonators. Positive, controllable resonance shifts that vary with fluence are demonstrated, inducing little loss.
Keywords :
amorphisation; elemental semiconductors; high-speed optical techniques; laser tuning; micro-optics; micromechanical resonators; optical losses; optical resonators; optical waveguides; silicon; silicon compounds; surface treatment; Si; SiO2; c-Si waveguides clad surface; femtosecond laser tuning; microring resonators; optical loss; permanent tuning; positive controllable resonance shifts; single femtosecond laser pulses; surface amorphization; thick SiO2 cladding; Laser tuning; Optical resonators; Optical waveguides; Silicon; Ultrafast optics; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
