• DocumentCode
    1771239
  • Title

    Femtosecond laser tuning of Si microring resonators by surface amorphization through a thick SiO2 cladding

  • Author

    Bachman, D. ; Chen, Zhe ; Fedosejevs, Robert ; Tsui, Y.Y. ; Van, V.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Single femtosecond laser pulses are used to modify the surface of c-Si waveguides clad by SiO2 for permanent tuning of microring resonators. Positive, controllable resonance shifts that vary with fluence are demonstrated, inducing little loss.
  • Keywords
    amorphisation; elemental semiconductors; high-speed optical techniques; laser tuning; micro-optics; micromechanical resonators; optical losses; optical resonators; optical waveguides; silicon; silicon compounds; surface treatment; Si; SiO2; c-Si waveguides clad surface; femtosecond laser tuning; microring resonators; optical loss; permanent tuning; positive controllable resonance shifts; single femtosecond laser pulses; surface amorphization; thick SiO2 cladding; Laser tuning; Optical resonators; Optical waveguides; Silicon; Ultrafast optics; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2014 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6989335
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1771239