Title :
Structure and Energy Deposition Process of an Inductively Coupled Plasma Under Confronting Divergent Magnetic Fields
Author :
Minami, Yasuo ; Asami, Yusuke ; Sugawara, H.
Author_Institution :
Grad. Sch. of Inf. Sci. & Technol., Hokkaido Univ., Sapporo, Japan
Abstract :
We simulated electron motion in confronting divergent magnetic fields (CDMFs) using a Monte Carlo method. Fundamental plasma structure under a filtering effect of the separatrix of CDMFs was depicted. Hot spots of energy deposition into electrons were observed not only near the RF antenna but also near the equistrength surface of 2BECR, where BECR is the RF-resonant magnetic field strength.
Keywords :
Monte Carlo methods; antennas in plasma; plasma simulation; Monte Carlo method; RF antenna; RF-resonant magnetic field strength; divergent magnetic fields; electron motion; energy deposition; energy deposition process; inductively coupled plasma; plasma structure; separatrix filtering effect; Discharges (electric); Fault diagnosis; Magnetic resonance; Magnetic separation; Monte Carlo methods; Plasmas; Radio frequency; (X) -point plasma; Cusp magnetic field; Monte Carlo method; X-point plasma; filtering effect; separatrix;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2014.2343275
