Title :
Tuning fork cavity optomechanical transducers
Author :
Yuxiang Liu ; Davanco, Marcelo ; Chaoyang Ti ; Aksyuk, Vladimir ; Srinivasan, K.
Author_Institution :
Dept. of Mech. Eng., Worcester Polytech. Inst., Worcester, MA, USA
Abstract :
We present on-chip Si3N4 optomechanical transducers that integrate nanomechanical tuning forks with microdisk resonators for displacement measurements. Enhanced mechanical Q relative to single cantilevers and mechanical frequency adjustment by beam stress engineering were realized.
Keywords :
micromechanical resonators; nanoelectromechanical devices; optical sensors; silicon compounds; transducers; vibrations; Si3N4; beam stress engineering; displacement measurements; mechanical frequency adjustment; microdisk resonators; nanomechanical tuning forks; on-chip Si3N4 optomechanical transducers; single cantilevers; tuning fork cavity optomechanical transducers; Cavity resonators; Clamps; Optical resonators; Resonant frequency; Stress; Transducers; Vibrations;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
